Innovation Expansion Section - Unit for Advanced Semiconductor Metrology
Smart lab, Research department
Innovation Expansion Section - Unit for Advanced Semiconductor Metrology
- Members
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Professor KANIE Kiyoshi International Center for Synchrotron Radiation Innovation Smart Concurrent : Institute of Multidisciplinary Research for Advanced Materials
Deputy Director, Professor TAKAHASHI Yukio International Center for Synchrotron Radiation Innovation Smart Concurrent : Institute of Multidisciplinary Research for Advanced Materials, Institute for Materials Research, RIKEN SPring-8 Center, Institute for Catalysis, Hokkaido University
Director, Professor CHIBA Daichi International Center for Synchrotron Radiation Innovation Smart Concurrent : The Institute of Scientific and Industrial Research, The University of Osaka
Professor NAKAMURA Tetsuya International Center for Synchrotron Radiation Innovation Smart Concurrent : National Institute for Materials Science / Photon Science Innovation Center / Japan Synchrotron Radiation Research Institute